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ModsMS3012

MicroNanoelectronic Materials Processing

Current offering — AY2025/2026 Semester 2

Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices

AUs3.0 AUs
Grade Type
Prerequisite
Not Available To Programme
Not Available To All Programme With
Not Available As BDE/UE To Programme
Not Available As Core To Programme
Not Available As PE To Programme
Mutually Exclusive WithMS3002
Not Offered As BDE
Not Offered As Unrestricted Elective
Exam

Total hours per week: 3 hrs