Historical snapshot — AY2022/2023 Semester 1 · View current offering →
ModsMS3012AY2022/2023 Semester 1
MicroNanoelectronic Materials Processing
AY2022/2023 Semester 1
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
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