Historical snapshot — AY2025/2026 Semester 1 · View current offering →
ModsMS3012AY2025/2026 Semester 1
MicroNanoelectronic Materials Processing
AY2025/2026 Semester 1
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |||
|---|---|---|---|---|---|---|---|
| 1230 | COMMON LEC (LE) 1230-1420 Mon LT14, ONLINE Wk1-9,11-13, Teaching Wk10 | COMMON LEC (LE) 1230-1420 Mon LT14, ONLINE Wk1-9,11-13, Teaching Wk10 | |||||
| 1300 | |||||||
| 1330 | 15221 TUT (T1) 1330-1420 Tue LT10, ONLINE Wk2-9,11-13, Teaching Wk10 | 15221 TUT (T1) 1330-1420 Tue LT10, ONLINE Wk2-9,11-13, Teaching Wk10 | |||||
| 1400 | |||||||
| 1430 | 15222 TUT (T2) 1430-1520 Tue LT10, ONLINE Wk2-9,11-13, Teaching Wk10 | 15222 TUT (T2) 1430-1520 Tue LT10, ONLINE Wk2-9,11-13, Teaching Wk10 | |||||
| 1500 | |||||||