Historical snapshot — AY2014/2015 Semester 1 · View current offering →
ModsMS3012AY2014/2015 Semester 1
MicroNanoelectronic Materials Processing
AY2014/2015 Semester 1
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Not Available To All Programme With | (Admyr 2004-2010)-Non Direct Entry, (Admyr 2004-2011)-Direct Entry |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 1030 | 15233 TUT (T3) 1030-1130 Fri TR20 Wk2-13 | ||||
| 1100 | |||||
| 1130 | COMMON LEC (LE) 1130-1330 Wed LT3 | 15234 TUT (T4) 1130-1230 Fri TR20 Wk2-13 | |||
| 1200 | |||||
| 1230 | |||||
| 1300 | |||||
| 1330 | 15231 TUT (T1) 1330-1430 Thu TR22 Wk2-13 | ||||
| 1400 | |||||
| 1430 | 15232 TUT (T2) 1430-1530 Thu TR22 Wk2-13 | ||||
| 1500 |