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ModsMS3012AY2014/2015 Semester 2
MicroNanoelectronic Materials Processing
AY2014/2015 Semester 2
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Not Available To All Programme With | (Admyr 2004-2010)-Non Direct Entry, (Admyr 2004-2011)-Direct Entry |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
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| 1800 |