Historical snapshot — AY2019/2020 Semester 1 · View current offering →
ModsMS3012AY2019/2020 Semester 1
MicroNanoelectronic Materials Processing
AY2019/2020 Semester 1
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 930 | COMMON LEC (LE) 0930-1130 Wed LT4 | ||||
| 1000 | |||||
| 1030 | |||||
| 1100 | |||||
| 1130 | 15222 TUT (T2) 1130-1230 Thu TR+18 Wk2-13 | 15224 TUT (T4) 1130-1230 Fri TR+23 Wk2-13 | |||
| 1200 | |||||
| 1230 | 15223 TUT (T3) 1230-1330 Thu TR+18 Wk2-13 | 15225 TUT (T5) 1230-1330 Fri TR+23 Wk2-13 | |||
| 1300 |