Historical snapshot — AY2025/2026 Semester 2 · View current offering →
ModsMS3012AY2025/2026 Semester 2
MicroNanoelectronic Materials Processing
AY2025/2026 Semester 2
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 930 | COMMON LEC (LE) 0930-1120 Tue LT19 | ||||
| 1000 | |||||
| 1030 | |||||
| 1100 | |||||
| 1130 | |||||
| 1200 | |||||
| 1230 | 15221 TUT (T1) 1230-1320 Tue LT10 Wk2-13 | ||||
| 1300 | |||||
| 1330 | 15222 TUT (T2) 1330-1420 Tue LT10 Wk2-13 | ||||
| 1400 | |||||
| 1430 | |||||
| 1500 | |||||
| 1530 | 15223 TUT (T3) 1530-1620 Wed LT11 Wk2-13 | ||||
| 1600 |