Historical snapshot — AY2020/2021 Semester 1 · View current offering →
ModsMS3012AY2020/2021 Semester 1
MicroNanoelectronic Materials Processing
AY2020/2021 Semester 1
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 930 | COMMON LEC (LE) 0930-1130 Wed ONLINE | ||||
| 1000 | |||||
| 1030 | |||||
| 1100 | 15221 TUT (T1) 1100-1230 Thu LT1A Wk2-13 | ||||
| 1130 | 15222 TUT (T2) 1130-1300 Fri LT1A Wk2-13 | ||||
| 1200 | |||||
| 1230 | |||||
| 1300 | 15223 TUT (T3) 1300-1430 Fri LT1A Wk2-13 | ||||
| 1330 | |||||
| 1400 |