MicroNanoelectronic Materials Processing
AY2021/2022 Semester 1
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |||
|---|---|---|---|---|---|---|---|
| 930 | COMMON LEC (LE) 0930-1120 Wed ONLINE | ||||||
| 1000 | |||||||
| 1030 | 15221 TUT (T1) 1030-1120 Thu TR+15, ONLINE Wk3-13, Teaching Wk2 | 15221 TUT (T1) 1030-1120 Thu TR+15, ONLINE Wk3-13, Teaching Wk2 | |||||
| 1100 | |||||||
| 1130 | 15222 TUT (T2) 1130-1220 Thu ONLINE, TR+15 Wk2, Teaching Wk3-13 | 15222 TUT (T2) 1130-1220 Thu ONLINE, TR+15 Wk2, Teaching Wk3-13 | 15223 TUT (T3) 1130-1220 Fri ONLINE, TR+15 Wk2, Teaching Wk3-13 | 15223 TUT (T3) 1130-1220 Fri ONLINE, TR+15 Wk2, Teaching Wk3-13 | |||
| 1200 | |||||||
| 1230 | 15224 TUT (T4) 1230-1320 Fri ONLINE, TR+15 Wk2, Teaching Wk3-13 | 15224 TUT (T4) 1230-1320 Fri ONLINE, TR+15 Wk2, Teaching Wk3-13 | |||||
| 1300 | |||||||