MicroNanoelectronic Materials Processing
AY2024/2025 Semester 2
Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices
| AUs | 3.0 AUs |
| Categories | Core |
| Mutually Exclusive With | MS3002 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |||
|---|---|---|---|---|---|---|---|
| 930 | COMMON LEC (LE) 0930-1120 Tue LT19, ONLINE Wk1,2,4-13, Teaching Wk3 | COMMON LEC (LE) 0930-1120 Tue LT19, ONLINE Wk1,2,4-13, Teaching Wk3 | |||||
| 1000 | |||||||
| 1030 | |||||||
| 1100 | |||||||
| 1130 | 15222 TUT (T2) 1130-1220 Fri LHN-LT, ONLINE Wk2,4-13, Teaching Wk3 | 15222 TUT (T2) 1130-1220 Fri LHN-LT, ONLINE Wk2,4-13, Teaching Wk3 | |||||
| 1200 | |||||||
| 1230 | 15221 TUT (T1) 1230-1320 Tue TR+19, ONLINE Wk2,4-13, Teaching Wk3 | 15221 TUT (T1) 1230-1320 Tue TR+19, ONLINE Wk2,4-13, Teaching Wk3 | 15223 TUT (T3) 1230-1320 Fri LHN-LT, ONLINE Wk2,4-13, Teaching Wk3 | 15223 TUT (T3) 1230-1320 Fri LHN-LT, ONLINE Wk2,4-13, Teaching Wk3 | |||
| 1300 | |||||||