This course aims to provide comprehensive introduction to student on the fabrication technologies of micro- and nano-structured electronics devices. The fabrication techniques discussed in the course are relevant for micro- and nano-devices in the fields of semiconductor, magnetics, optoelectronics, micro- and nano-electro-mechanical systems (MEMS/NEMS), and biomedical. This course covers essential topics including principles, fabrications and applications. The working principles of each fabrication technique will be explained in detail, and the combination of these techniques as a complete process flow for making different microdevices will be discussed. Specifically, it is also the aim of this course to familiarise student with the semiconductor processing techniques employed in the advanced manufacturing industry so that the student can acquire direct applied knowledge before embarking their engineering career in the semiconductor industry.
| AUs | 3.0 AUs |
| Grade Type | |
| Prerequisite | PH2102 |
| Exam | 25 November 2026, 1.00 pm - 3.30 pm |
The Exam information shown may be subject to changes. Students are to check the finalised exam timetable with exam seat information, which will be available at the 'Examination Seating Arrangement' webpage, 2 weeks before start of examination.
Prerequisite Graph
Required first
PH2102ElectromagnetismFabrication Of Micro-& Nanoelectronic Devices
Unlocks
Available Indexes
| Mon | Tue | Wed | Thu | Fri | ||
|---|---|---|---|---|---|---|
| 1030 | COMMON LEC (LE) 1030-1220 Fri SPMS-LT4 | |||||
| 1100 | ||||||
| 1130 | ||||||
| 1200 | ||||||
| 1230 | ||||||
| 1300 | ||||||
| 1330 | ||||||
| 1400 | ||||||
| 1430 | ||||||
| 1500 | ||||||
| 1530 | 70481 TUT (T) 1530-1620 Tue SPMS-LT2, SPMS-LT4 Wk1,3-13, Teaching Wk2 | 70481 TUT (T) 1530-1620 Tue SPMS-LT2, SPMS-LT4 Wk1,3-13, Teaching Wk2 | ||||
| 1600 | ||||||