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ModsPH3601AY2014/2015 Semester 1
Fabrication Of MicroAnd Nanoelectronic Devices
AY2014/2015 Semester 1
This course discusses the basic principles underlying the fabrication of micro- and nanoelectronic devices and material processing techniques. Semiconductor based device fabrication - ion implantation, diffusion, oxidation, epitaxy, thin film deposition, material and device characterization, lithography, etching and cleaning. Conventional and non-conventional fabrication techniques of magnetic, organic and bioMEMS devices, and its characterization techniques will be discussed.
| AUs | 4.0 AUs |
| Categories | CoreMinorsBDE |
| Not Available To All Programme With | (Admyr 2004-2010) |
| Mutually Exclusive With | PAP361 |
| Exam |
Available Indexes
| Mon | Tue | Wed | Thu | Fri | ||
|---|---|---|---|---|---|---|
| 1430 | COMMON LEC (LE) 1430-1630 Wed SPMS-LT5 | |||||
| 1500 | ||||||
| 1530 | COMMON LEC (LE) 1530-1630 Mon SPMS-LT4 | |||||
| 1600 | ||||||
| 1630 | 73136 TUT (T1) 1630-1730 Mon LAB 05-12 Wk2-13 | 73137 TUT (T2) 1630-1730 Mon LAB 01-01 Wk2-13 | ||||
| 1700 | ||||||