Fabrication Of MicroAnd Nanoelectronic Devices

AY2014/2015 Semester 1

This course discusses the basic principles underlying the fabrication of micro- and nanoelectronic devices and material processing techniques. Semiconductor based device fabrication - ion implantation, diffusion, oxidation, epitaxy, thin film deposition, material and device characterization, lithography, etching and cleaning. Conventional and non-conventional fabrication techniques of magnetic, organic and bioMEMS devices, and its characterization techniques will be discussed.