New: filter modules by day and time, student links, custom courses →
AY2016/2017 Semester 1
This course discusses the basic principles underlying the fabrication of micro- and nanoelectronic devices and material processing techniques. Semiconductor based device fabrication - ion implantation, diffusion, oxidation, epitaxy, thin film deposition, material and device characterization, lithography, etching and cleaning. Conventional and non-conventional fabrication techniques of magnetic, organic and bioMEMS devices, and its characterization techniques will be discussed.
| AUs | 4.0 AUs |
| Categories | CoreMinorsBDE |
| Not Available To All Programme With | (Admyr 2004-2010) |
| Mutually Exclusive With | PAP361 |
| Exam |
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 1330 | 73061 TUT (T) 1330-1430 Mon LAB ROOM Wk2-13 | COMMON LEC (LE) 1330-1530 Wed SPMS-LT3 | |||
| 1400 | |||||
| 1430 | COMMON LEC (LE) 1430-1530 Mon SPMS-LT3 | ||||
| 1500 |
