Fabrication Of Micro Nanoelectronic Devices

AY2021/2022 Semester 1

This course aims to provide comprehensive introduction to student on the fabrication technologies of micro- and nano-structured electronics devices. The fabrication techniques discussed in the course are relevant for micro- and nano-devices in the fields of semiconductor, magnetics, optoelectronics, micro- and nano-electro-mechanical systems (MEMS/NEMS), and biomedical. This course covers essential topics including principles, fabrications and applications. The working principles of each fabrication technique will be explained in detail, and the combination of these techniques as a complete process flow for making different microdevices will be discussed. Specifically, it is also the aim of this course to familiarise student with the semiconductor processing techniques employed in the advanced manufacturing industry so that the student can acquire direct applied knowledge before embarking their engineering career in the semiconductor industry.