Not offered in the current semester · Last offered AY2014/2015 Semester 1
This course discusses the basic principles underlying the fabrication of micro- and nanoelectronic devices and material processing techniques. Semiconductor based device fabrication - ion implantation, diffusion, oxidation, epitaxy, thin film deposition, material and device characterization, lithography, etching and cleaning. Conventional and non-conventional fabrication techniques of magnetic, organic and bioMEMS devices, and its characterization techniques will be discussed.
| AUs | 4.0 AUs |
| Grade Type | |
| Prerequisite | PAP232 |
| Not Available To Programme | |
| Not Available To All Programme With | (Admyr 2011-onwards) |
| Not Available As BDE/UE To Programme | |
| Not Available As Core To Programme | |
| Not Available As PE To Programme | |
| Mutually Exclusive With | PH3601 |
| Not Offered As BDE | Yes |
| Not Offered As Unrestricted Elective | |
| Exam |
Total hours per week: 4 hrs
Available Indexes
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 930 | |||||
| 1000 | |||||
| 1030 | |||||
| 1100 | |||||
| 1130 | |||||
| 1200 | |||||
| 1230 | |||||
| 1300 | |||||
| 1330 | |||||
| 1400 | |||||
| 1430 | |||||
| 1500 | |||||
| 1530 | |||||
| 1600 | |||||
| 1630 | |||||
| 1700 | |||||
| 1730 | |||||
| 1800 |