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Historical snapshot: AY2022/2023 Semester 1 · View current offering
ModsEE3013AY2022/2023 Semester 1

Semiconductor Devices Processing

AY2022/2023 Semester 1

The course will provide you with the basic concepts of the engineering principles behind semiconductor processing, wafer fabrication and physical principles underlying the operation of basic semiconductor devices. The contents of the course include the fundamentals of p-n diodes, bipolar devices, MOS devices, deposition techniques, diffusion and thermal oxidation, ion implantation, lithography and etching. Contents: Fundamentals of Bipolar Devices. MOS Devices. Crystal growth and wafer preparation. Deposition Techniques. Diffusion and thermal oxidation. Ion implantation. Lithography. Etching.

AUs3.0 AUs
Categories
Core
Not Available As BDE/UE To ProgrammeMAT
Exam

Available indexes

MonTueWedThuFri
930

32012 LAB (EL01)

0930-1220 Tue

S2-B5A-01

Wk10

32316 LAB (EL02)

0930-1220 Tue

S2-B5A-01

Wk11

1000
1030
1100
1130
1200
1230
1300
1330

32012 TUT (EE01)

1330-1450 Mon

LT27, TR103, LHS-LT

Wk5-7,9-13, Teaching Wk1-4, Teaching Wk8

32316 TUT (EE01)

1330-1450 Mon

LT27, TR103, LHS-LT

Wk5-7,9-13, Teaching Wk1-4, Teaching Wk8

32317 TUT (EE01)

1330-1450 Mon

LT27, TR103, LHS-LT

Wk5-7,9-13, Teaching Wk1-4, Teaching Wk8

32317 LAB (EL03)

1330-1620 Thu

S2-B5A-01

Wk10

1400
1430
1500
1530
1600

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