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Historical snapshot: AY2021/2022 Semester 1 · View current offering
ModsEE3013AY2021/2022 Semester 1

Semiconductor Devices Processing

AY2021/2022 Semester 1

The course will provide you with the basic concepts of the engineering principles behind semiconductor processing, wafer fabrication and physical principles underlying the operation of basic semiconductor devices. The contents of the course include the fundamentals of p-n diodes, bipolar devices, MOS devices, deposition techniques, diffusion and thermal oxidation, ion implantation, lithography and etching. Contents: Fundamentals of Bipolar Devices. MOS Devices. Crystal growth and wafer preparation. Deposition Techniques. Diffusion and thermal oxidation. Ion implantation. Lithography. Etching.

AUs3.0 AUs
Categories
Core
Not Available As BDE/UE To ProgrammeMAT
Exam

Available indexes

MonTueWedThuFri
930

33066 LAB (EL01)

0930-1220 Mon

S2-B5A-01

Wk10

1000
1030
1100
1130

33066 TUT (EE01)

1130-1250 Tue

TR121, ONLINE

Wk3-13, Teaching Wk1,2

33067 TUT (EE01)

1130-1250 Tue

TR121, ONLINE

Wk3-13, Teaching Wk1,2

1200
1230
1300
1330

33067 LAB (EL02)

1330-1620 Tue

S2-B5A-01

Wk11

1400
1430
1500
1530
1600

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