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Historical snapshot: AY2020/2021 Semester 1 · View current offering
ModsEE3013AY2020/2021 Semester 1

Semiconductor Devices Processing

AY2020/2021 Semester 1

The course will provide you with the basic concepts of the engineering principles behind semiconductor processing, wafer fabrication and physical principles underlying the operation of basic semiconductor devices. The contents of the course include the fundamentals of p-n diodes, bipolar devices, MOS devices, deposition techniques, diffusion and thermal oxidation, ion implantation, lithography and etching. Contents: Fundamentals of Bipolar Devices. MOS Devices. Crystal growth and wafer preparation. Deposition Techniques. Diffusion and thermal oxidation. Ion implantation. Lithography. Etching.

AUs3.0 AUs
Categories
Core
Not Available As BDE/UE To ProgrammeMAT
Exam

Available indexes

MonTueWedThuFri
1330

33054 LAB (EL01)

1330-1630 Mon

ONLINE

Wk11

1400
1430

33054 TUT (EE01)

1430-1600 Fri

TR+90

1500
1530
1600

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