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AY2014/2015 Semester 1
Process integration for ULSI devices. CMOS well/isolation/gate module technology. Contact module technology. Interconnect and Metallization. Applications of Thin Films
| AUs | 3.0 AUs |
| Categories | CoreBDE |
| Mutually Exclusive With | MS4503 |
| Exam |
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 930 | COMMON LEC (LE) 0930-1130 Tue LT6 | ||||
| 1000 | |||||
| 1030 | |||||
| 1100 | |||||
| 1130 | 15351 TUT (T1) 1130-1230 Fri TR22 Wk2-13 | ||||
| 1200 | |||||
| 1230 | 15352 TUT (T2) 1230-1330 Fri TR22 Wk2-13 | ||||
| 1300 |
