Microfabrication Engineering

AY2022/2023 Semester 2

This course aims to provide you with fundamental knowledge of various semiconductor wafer fabrication technologies, their principles, systems and operations. You will learn basic concepts, structures, principles, and operation of semiconductor single crystal growth technology, vacuum technology, thermal annealing, semiconductor characterizations, semiconductor epitaxial growths, IC fabrication and MEMS processes. The knowledge you learnt in this course will enable you to gain a strong understanding of various technologies widely used in microfabrications.