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AY2020/2021 Semester 2
This course aims to provide you with fundamental knowledge of various semiconductor wafer fabrication technologies, their principles, systems and operations. You will learn basic concepts, structures, principles, and operation of semiconductor single crystal growth technology, vacuum technology, thermal annealing, semiconductor characterizations, semiconductor epitaxial growths, IC fabrication and MEMS processes. The knowledge you learnt in this course will enable you to gain a strong understanding of various technologies widely used in microfabrications.
| AUs | 3.0 AUs |
| Categories | Core |
| Exam |
| Mon | Tue | Wed | Thu | Fri | |
|---|---|---|---|---|---|
| 930 | COMMON LEC (EELE) 0930-1030 Tue TR103 | ||||
| 1000 | |||||
| 1030 | |||||
| 1100 | |||||
| 1130 | 34071 TUT (F61) 1130-1230 Tue TR102 Wk2-13 | COMMON LEC (EELE) 1130-1230 Wed TR102 | |||
| 1200 |
