Historical snapshot — AY2024/2025 Semester 2 · View current offering →

Microelectronics Process Integration

AY2024/2025 Semester 2

Process integration for ULSI devices. CMOS well/isolation/gate module technology. Contact module technology. Interconnect and Metallization. Applications of Thin Films

AUs	3.0 AUs
Categories	CoreBDE
Mutually Exclusive With	MS4503
Exam

Available Indexes

	Mon
1330	COMMON LEC (LE) 1330-1520 Mon LT11, ONLINE Wk1,2,4-13, Teaching Wk3	COMMON LEC (LE) 1330-1520 Mon LT11, ONLINE Wk1,2,4-13, Teaching Wk3
1400
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1600
1630	15341 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3	15341 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3	15342 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3	15342 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3
1700

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