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AY2024/2025 Semester 2
Process integration for ULSI devices. CMOS well/isolation/gate module technology. Contact module technology. Interconnect and Metallization. Applications of Thin Films
| AUs | 3.0 AUs |
| Categories | CoreBDE |
| Mutually Exclusive With | MS4503 |
| Exam |
| Mon | Tue | Wed | Thu | Fri | |
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| 930 | |||||
| 1000 | |||||
| 1030 | |||||
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| 1130 | |||||
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| 1730 | |||||
| 1800 |
| Mon | Tue | Wed | Thu | Fri | ||||
|---|---|---|---|---|---|---|---|---|
| 1330 | COMMON LEC (LE) 1330-1520 Mon LT11, ONLINE Wk1,2,4-13, Teaching Wk3 | COMMON LEC (LE) 1330-1520 Mon LT11, ONLINE Wk1,2,4-13, Teaching Wk3 | ||||||
| 1400 | ||||||||
| 1430 | ||||||||
| 1500 | ||||||||
| 1530 | ||||||||
| 1600 | ||||||||
| 1630 | 15341 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3 | 15341 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3 | 15342 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3 | 15342 TUT (T1) 1630-1720 Mon TR+18, ONLINE Wk2,4-13, Teaching Wk3 | ||||
| 1700 | ||||||||
